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1

Controlled growth of PbZr0.52Ti0.48O3 using nanosheet coated Si (001)

Chopra, Anuj, Bayraktar, Muharrem, Bijkerk, Fred, Rijnders, Guus

Journal:

Thin Solid Films

Année:

2015

Langue:

english

Fichier:

PDF, 1021 KB

english, 2015

2

Characterization of EUV induced carbon films using laser-generated surface acoustic waves

Chen, Juequan, Lee, Chris J., Louis, Eric, Bijkerk, Fred, Kunze, Reinhard, Schmidt, Hagen, Schneider, Dieter, Moors, Roel

Journal:

Diamond and Related Materials

Année:

2009

Langue:

english

Fichier:

PDF, 464 KB

english, 2009

3

Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation

Nyabero, Steven L., van de Kruijs, Robbert W. E., Yakshin, Andrey E., Makhotkin, Igor A., Bosgra, Jeroen, Bijkerk, Fred

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2014

Langue:

english

Fichier:

PDF, 1.53 MB

english, 2014

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, Igor A., Zoethout, Erwin, Louis, Eric, Yakunin, Andrei M., Müllender, Stephan, Bijkerk, Fred, Naulleau, Patrick P., Wood II, Obert R.

Année:

2012

Langue:

english

Fichier:

PDF, 221 KB

english, 2012

5

Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

Makhotkin, Igor A., Zoethout, Erwin, Louis, Eric, Yakunin, Andrei M., Müllender, Stephan, Bijkerk, Fred

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2012

Langue:

english

Fichier:

PDF, 715 KB

english, 2012

6

SPIE Proceedings [SPIE ECO4 (The Hague '91) - The Hague, Netherlands (Monday 11 March 1991)] Excimer Lasers and Applications III - Laser plasma XUV sources: a role for excimer lasers?

Bijkerk, Fred, Shevelko, Alexander P., Letardi, Tommaso, Laude, Lucien D.

Année:

1991

Langue:

english

Fichier:

PDF, 910 KB

english, 1991

7

SPIE Proceedings [SPIE ECO4 (The Hague '91) - The Hague, Netherlands (Monday 11 March 1991)] Excimer Lasers and Applications III - 100-Hz KrF laser plasma x-ray source

Turcu, I. C. Edmond, Gower, Malcolm C., Reason, C. J., Huntington, P., Schulz, M., Michette, Alan G., Bijkerk, Fred, Louis, Eric, Tallents, Gregory J., Al-Hadithi, Yas, Batani, Dimitri, Letardi, Tomma

Année:

1991

Langue:

english

Fichier:

PDF, 511 KB

english, 1991

8

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

Bos, R A J M van den, Reinink, J., Lopaev, D.V., Lee, C J, Benschop, J P H, Bijkerk, Fred

Journal:

Journal of Physics D Applied Physics

Année:

2018

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2018

9

Secondary electron yield measurements of carbon covered multilayer optics

Juequan Chen, Eric Louis, Jan Verhoeven, Rob Harmsen, Chris J. Lee, Monika Lubomska, Maarten van Kampen, Willem van Schaik, Fred Bijkerk

Journal:

Applied Surface Science

Année:

2010

Langue:

english

Fichier:

PDF, 528 KB

english, 2010

10

Absorption of EUV in laser plasmas generated on xenon gas jets

René de Bruijn, Konstantin Koshelev, Gerben Kooijman, Elena Simona Toma, Fred Bijkerk

Journal:

Journal of Quantitative Spectroscopy and Radiative Transfer

Année:

2003

Langue:

english

Fichier:

PDF, 168 KB

english, 2003

11

Linearity of P–N junction photodiodes under pulsed irradiation

Remko Stuik, Fred Bijkerk

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2002

Langue:

english

Fichier:

PDF, 237 KB

english, 2002

12

Absolute calibration of a multilayer-based XUV diagnostic

Remko Stuik, Frank Scholze, Johannes Tümmler, Fred Bijkerk

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2002

Langue:

english

Fichier:

PDF, 369 KB

english, 2002

13

Growth and sacrificial oxidation of transition metal nanolayers

Tim Tsarfati, Erwin Zoethout, Robbert van de Kruijs, Fred Bijkerk

Journal:

Surface Science

Année:

2009

Langue:

english

Fichier:

PDF, 1.91 MB

english, 2009

14

Performance optimization of a high-repetition-rate KrF laser plasma x-ray source for microlithography

Fred Bijkerk, Eric Louis, Marnix J. van der Wiel, Edmond C.I. Turcu, Greg J. Tallents, Dimitri Batani

Journal:

Journal of X-Ray Science and Technology

Année:

1992

Langue:

english

Fichier:

PDF, 1.41 MB

english, 1992

15

Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers

Salim Abdali, Leif Gerward, Andrey E. Yakshin, Eric Louis, Fred Bijkerk

Journal:

Materials Research Bulletin

Année:

2002

Langue:

english

Fichier:

PDF, 135 KB

english, 2002

16

Microstructure of Mo/Si multilayers with B_4C diffusion barrier layers

Nedelcu, Ileana, van de Kruijs, Robbert W. E., Yakshin, Andrey E., Bijkerk, Fred

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 721 KB

english, 2009

17

In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers

Juequan Chen, Eric Louis, Rob Harmsen, Tim Tsarfati, Herbert Wormeester, Maarten van Kampen, Willem van Schaik, Robbert van de Kruijs, Fred Bijkerk

Journal:

Applied Surface Science

Année:

2011

Langue:

english

Fichier:

PDF, 753 KB

english, 2011

18

Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

Bayraktar, Muharrem, Wessels, Werner A, Lee, Chris J, van Goor, Fred A, Koster, Gertjan, Rijnders, Guus, Bijkerk, Fred

Journal:

Journal of Physics D Applied Physics

Année:

2012

Langue:

english

Fichier:

PDF, 228 KB

english, 2012

19

SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] X-Ray and Extreme Ultraviolet Optics - Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite

Louis, Eric, Spiller, Eberhard A., Abdali, Salim, Christensen, Finn E., Voorma, Harm-Jan, Koster, Norbert B., Frederiksen, Peter K., Tarrio, Charles, Gullikson, Eric M., Bijkerk, Fred, Hoover, Richard

Année:

1995

Langue:

english

Fichier:

PDF, 357 KB

english, 1995

20

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Reflectivity of Mo/Si multilayer systems for EUVL

Louis, Eric, Yakshin, Andrey E., Goerts, Peter C., Abdali, Salim, Maas, Edward L. G., Stuik, R., Bijkerk, Fred, Schmitz, Detlef, Scholze, Frank, Ulm, Gerhard, Haidl, Markus, Vladimirsky, Yuli

Année:

1999

Langue:

english

Fichier:

PDF, 120 KB

english, 1999

21

Sputtering yields of Ru, Mo, and Si under low energy Ar[sup +] bombardment

Wu, Shiou-Min, van de Kruijs, Robbert, Zoethout, Erwin, Bijkerk, Fred

Journal:

Journal of Applied Physics

Année:

2009

Langue:

english

Fichier:

PDF, 668 KB

english, 2009

22

Enhancement of laser plasma EUV emission by shockwave–plasma interaction

Bruijn, René de, Koshelev, Konstantin, Bijkerk, Fred

Journal:

Journal of Physics D Applied Physics

Année:

2003

Langue:

english

Fichier:

PDF, 221 KB

english, 2003

23

Low-Z element analysis by soft X-ray line emission of a laser-produced plasma

Van Brug, Hedser, Bijkerk, Fred, van der Wiel, Marnix J., van Wingerden, Bob

Journal:

Journal of Analytical Atomic Spectrometry

Année:

1987

Langue:

english

Fichier:

PDF, 671 KB

english, 1987

24

Development of low-energy X-ray fluorescence micro-distribution analysis using a laser plasma X-ray source and multilayer optics

Stuik, Remko, Shmaenok, Leonid A., Fledderus, Henri, Andreev, Sergei S., Shamov, Eugeny A., Zuev, Sergei Yu., Salashchenko, Nikolay N., Bijkerk, Fred

Journal:

Journal of Analytical Atomic Spectrometry

Année:

1999

Langue:

english

Fichier:

PDF, 141 KB

english, 1999

25

Pulsed-laser irradiated silicon studied by time-resolved x-ray absorption (90 – 300 eV)

Murakami, Kouichi, Gerritsen, Hans C., van Brug, Hedser, Bijkerk, Fred, Saris, Frans W., van der Wiel, Marnix J.

Journal:

Physical Review Letters

Année:

1986

Langue:

english

Fichier:

PDF, 776 KB

english, 1986

26

In-depth agglomeration of d-metals at Si-on-Mo interfaces

Tsarfati, Tim, Zoethout, Erwin, van de Kruijs, Robbert, Bijkerk, Fred

Journal:

Journal of Applied Physics

Année:

2009

Langue:

english

Fichier:

PDF, 570 KB

english, 2009

27

Enhancement of laser plasma extreme ultraviolet emission by shockwave-laser interaction

de Bruijn, René, Koshelev, Konstantin N., Zakharov, Serguei V., Novikov, Vladimir G., Bijkerk, Fred

Journal:

Physics of Plasmas

Année:

2005

Langue:

english

Fichier:

PDF, 709 KB

english, 2005

28

Wavefront correction in the extreme ultraviolet wavelength range using piezoelectric thin films

Bayraktar, Muharrem, Chopra, Anuj, Rijnders, Guus, Boller, Klaus, Bijkerk, Fred

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2014

29

Carbon-induced extreme ultraviolet reflectance loss characterized using visible-light ellipsometry

Chen, Juequan, Louis, Eric, Wormeester, Herbert, Harmsen, Rob, van de Kruijs, Robbert, Lee, Chris J, van Schaik, Willem, Bijkerk, Fred

Journal:

Measurement Science and Technology

Année:

2011

Langue:

english

Fichier:

PDF, 426 KB

english, 2011

30

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Stress mitigation in Mo/Si multilayers for EUV lithography

Zoethout, Erwin, Sipos, G., van de Kruijs, R. W., Yakshin, Andrey E., Louis, Eric, Muellender, Stefan, Bijkerk, Fred, Engelstad, Roxann L.

Année:

2003

Langue:

english

Fichier:

PDF, 176 KB

english, 2003

31

Mo/Si multilayer-coated amplitude-division beam splitters for XUV radiation sources

Sobierajski, Ryszard, Loch, Rolf Antonie, van de Kruijs, Robbert W. E., Louis, Eric, von Blanckenhagen, Gisela, Gullikson, Eric M., Siewert, Frank, Wawro, Andrzej, Bijkerk, Fred

Journal:

Journal of Synchrotron Radiation

Année:

2013

Langue:

english

Fichier:

PDF, 924 KB

english, 2013

32

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Emerging Lithographic Technologies IV - Progress in Mo/Si multilayer coating technology for EUVL optics

Louis, Eric, Yakshin, Andrey E., Goerts, Peter C., Oestreich, Sebastian, Stuik, R., Maas, Edward L. G., Kessels, M. J. H., Bijkerk, Fred, Haidl, Markus, Muellender, Stefan, Mertin, Michael, Schmitz, D

Année:

2000

Langue:

english

Fichier:

PDF, 802 KB

english, 2000

33

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, CA (Sunday 22 February 2009)] Alternative Lithographic Technologies - Ellipsometric and surface acoustic wave sensing of carbon contamination on EUV optics

Chen, Juequan, Louis, Eric, Bijkerk, Fred, Lee, Chris J., Wormeester, Herbert, Kunze, Reinhard, Schmidt, Hagen, Schneider, Dieter, Moors, Roel, van Schaik, Willem, Lubomska, Monika, Schellenberg, Fran

Année:

2009

Langue:

english

Fichier:

PDF, 331 KB

english, 2009

34

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Multilayer reflectance during exposure to EUV radiation

Oestreich, Sebastian, Klein, Roman, Scholze, Frank, Jonkers, Jeroen, Louis, Eric, Yakshin, Andrey E., Goerts, Peter C., Ulm, Gerhard, Haidl, Markus, Bijkerk, Fred, Kaiser, Winfried M., Stulen, Richard

Année:

2000

Langue:

english

Fichier:

PDF, 191 KB

english, 2000

35

Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors

Bosgra, Jeroen, Zoethout, Erwin, van der Eerden, Ad M. J., Verhoeven, Jan, van de Kruijs, Robbert W. E., Yakshin, Andrey E., Bijkerk, Fred

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 429 KB

english, 2012

36

Ellipsometry with randomly varying polarization states

Liu, Feng, Lee, Chris J., Chen, Juequan, Louis, Eric, van der Slot, Peter J. M., Boller, Klaus J., Bijkerk, Fred

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1011 KB

english, 2012

37

Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge

Makhotkin, Igor A., Zoethout, Erwin, Louis, Eric, Yakunin, Andrei M., Müllender, Stephan, Bijkerk, Fred

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 812 KB

english, 2012

38

Correction to article “Ellipsometry with randomly varying polarization states”

Liu, Feng, Lee, Chris J., Chen, Juequan, Louis, Eric, van der Slot, Peter J. M., Boller, Klaus J., Bijkerk, Fred

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1.09 MB

english, 2012

39

Short period La/B and LaN/B multilayer mirrors for ~68 nm wavelength

Makhotkin, Igor A., Zoethout, Erwin, van de Kruijs, Robbert, Yakunin, Sergey N., Louis, Eric, Yakunin, A. M., Banine, V., Müllender, S., Bijkerk, Fred

Journal:

Année:

2013

Langue:

english

Fichier:

PDF, 1.06 MB

english, 2013

40

Spectral purification and infrared light recycling in extreme ultraviolet lithography sources

Bayraktar, Muharrem, van Goor, Fred A., Boller, Klaus J., Bijkerk, Fred

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 1.75 MB

english, 2014

41

High efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths

Huang, Qiushi, de Boer, Meint, Barreaux, Jonathan, van der Meer, Robert, Louis, Eric, Bijkerk, Fred

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 5.81 MB

english, 2014

42

Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001)

Liu, Feng, Sturm, J.M., Lee, Chris J., Bijkerk, Fred

Journal:

Surface Science

Année:

2015

Langue:

english

Fichier:

PDF, 619 KB

english, 2015

43

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Advances in X-Ray/EUV Optics and Components X - High-reflectance La/B-based multilayer mirror for 6.x-nm wavelength

Goto, Shunji, Morawe, Christian, Khounsary, Ali M., Kuznetsov, Dmitry, Yakshin, Andrey, Sturm, Marko, van de Kruijs, Robbert, Louis, Eric, Bijkerk, Fred

Année:

2015

Langue:

english

Fichier:

PDF, 1.82 MB

english, 2015

44

Time-Resolved X-Ray Absorption of An Amorphous Si Foil During Pulsed Laser Irradiation

Murakami, Kouichi, Gerritsen, Hans C., Brug, Hedser Van, Bijkerk, Fred, Saris, Frans W., Wiel, Marnix J. Van Der

Journal:

MRS Proceedings

Année:

1985

Langue:

english

Fichier:

PDF, 386 KB

english, 1985

45

Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors

Klaver, Peter, Goedheer, Wim, Bijkerk, Fred, Thijsse, Barend J.

Journal:

MRS Proceedings

Année:

1999

Langue:

english

Fichier:

PDF, 1.67 MB

english, 1999

46

SPIE Proceedings [SPIE Ninth International Symposium on Gas Flow and Chemical Lasers - Heraklion, Greece (Monday 21 September 1992)] 9th International Symposium on Gas Flow and Chemical Lasers - Characterization of a novel two-stage KrF laser with high-pulse energy and low-beam divergence

Bijkerk, Fred, Shmaenok, Leonid A., Louis, Eric, Nikolaus, Bernard K., Voss, Frank, Desor, R., Fotakis, Costas, Kalpouzos, Costas, Papazoglou, Theodore G.

Année:

1993

Langue:

english

Fichier:

PDF, 523 KB

english, 1993

47

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Emerging Lithographic Technologies II - Control of defects in EUV multilayers and demonstration of at-wavelength defect characterization by EUV microscopy

Louis, Eric, den Hartog, Mark J. H., Maas, Edward L. G., Bijkerk, Fred, Vladimirsky, Yuli

Année:

1998

Langue:

english

Fichier:

PDF, 1.31 MB

english, 1998

48

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Applications of X Rays Generated from Lasers and Other Bright Sources - Extreme ultraviolet spectroscopy of a laser plasma source for lithography

Bijkerk, Fred, Shevelko, Alexander P., Shmaenok, Leonid A., Churilov, S. S., Kyrala, George A., Gauthier, Jean-Claude J.

Année:

1997

Langue:

english

Fichier:

PDF, 191 KB

english, 1997

49

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Emerging Lithographic Technologies II - Demonstration of a foil trap technique to eliminate laser plasma atomic debris and small particulates

Shmaenok, L. A., de Bruijn, C. C., Fledderus, H. F., Stuik, R., Schmidt, Alexander A., Simanovski, Dmitrii M., Sorokin, Anatoley V., Andreeva, T. A., Bijkerk, Fred, Vladimirsky, Yuli

Année:

1998

Langue:

english

Fichier:

PDF, 869 KB

english, 1998

50

SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Applications of Laser Plasma Radiation - Optimization of excimer laser-induced x-ray sources for soft x-ray projection lithography

Bijkerk, Fred, Shmaenok, Leonid A., Louis, Eric, van Honk, A., van der Wiel, Marnix J., Platonova, Y. Y., Shevelko, Alexander P., Mitrofanov, Alexander V., Voss, Frank, Desor, R., Frowein, Helmut, Nik

Année:

1994

Langue:

english

Fichier:

PDF, 179 KB

english, 1994